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    • 专利摘要:
    The present invention relates to a UV-visible laser system with ultrashort pulses of high power and / or high energy. According to the invention, the laser system comprises at least one non-linear optical crystal (1) adapted to receive two distinct ultra-short laser pulses (31, 32) in the visible or infrared range respectively emitted by two separate laser pulse sources. (11, 12) and time synchronization means (41, 42) adapted so that said two ultra-short laser pulses (31, 32) overlap temporally and spatially in said nonlinear optical crystal (1) with a any phase shift, and generate, by sum of frequency, an ultra-short laser pulse (131) having an optical frequency equal to the sum of the respective optical frequencies of the two distinct laser pulses (31, 32).
    公开号:FR3023423A1
    申请号:FR1456388
    申请日:2014-07-03
    公开日:2016-01-08
    发明作者:Antoine Courjaud
    申请人:Amplitude Systemes SA；
    IPC主号:
    专利说明:

    [0001] TECHNICAL FIELD The present invention relates to a laser system with ultra-short pulses, high power and / or high energy in the ultraviolet-visible (UV-visible) spectral range. More specifically, the invention relates to a laser system for generating ultrashort UV-visible laser pulses using a nonlinear optical frequency conversion optical device for controlling the optical frequency of the output laser pulses. In this paper, the term optical frequency conversion encompasses nonlinear optical techniques of sum frequency generation and multiple harmonic generation.
    [0002] In this document, ultra-short pulses are defined as pulses of picosecond, sub-picosecond or femtosecond duration. More precisely, a picosecond pulse is understood to mean a light pulse with a duration of between 1 ps and 20 ps and a femtosecond pulse, a light pulse lasting between 1 fs and 1 ps. An ultra-short pulse laser system generally emits at a high repetition rate, typically between 50kHz and 10MHz. Thus, an ultra-short pulse laser system with a rate of 1MHz emits a train of ultra-short pulses, each pulse being of duration ps or fs, with a time interval of the order of one microsecond between successive pulses. A high-power pulse is understood to mean a light pulse having an average power of between 10W and 1MW and preferably greater than or equal to 10W, and a high-energy pulse having a light pulse having an energy of between 1004 and 1 kJ and preferably, greater than or equal to 1 mJ. It is considered here that the ultraviolet (UV) spectral range extends from 200 nm to 450 nm, the visible range from 450 nm to 750 nm and the infrared range from 750 nm to 1600 nm. By optical frequency y is meant a variable inversely proportional to the wavelength 2, of an optical radiation, defined by the equation: y = c / k where c represents the celerity of light in a vacuum. STATE OF THE ART Ultrashort lasers have many applications including laser micromachining, laser marking, analytical chemistry, nano-surgery and ophthalmic surgery. It is desired to develop ultra-short pulse lasers in the UV-visible range, at wavelengths ranging from lower and lower in the UV, to higher and higher energies per pulse and / or more and more high by impulse. Generally, a UV-visible laser pulse system is based on an infrared laser source and a non-linear optical frequency conversion optical device, for example by sum of frequency (also called harmonic generation). Indeed, there are sources and amplifiers crystal or optical fiber performing in the infrared field, because of the existence of proven industrial technologies. Such ultra-short pulse infrared laser sources make it possible to generate and amplify high power and / or high energy laser pulses in the infrared range. A nonlinear optical frequency sum optical conversion device converts the infrared laser pulses into laser pulses of optical frequency equal to a double, triple or quadruple harmonic of the optical frequency of the infrared pulses. A source of ultra-short UV-visible laser pulses is thus obtained. The sum of frequencies consists in effect of producing an optical radiation at the optical frequency v3 from two optical frequency radiations v1 and v2 respectively, connected by the following relation between the optical frequencies: v3 = v1 + v2 This relation is then equivalent to the following relation between the respective wavelengths: 1 / X 3 = 1 / X 1 + 1 / X 2 By way of illustrative example, FIG. 1 represents a conventional ultraviolet ultra-short pulse laser configuration with frequency conversion . This UV-visible pulse laser comprises a source 11 of near infrared laser pulses and a nonlinear optical frequency conversion device based here on the use of two nonlinear optical crystals 1, 2 arranged in series. For example, the source 11 is a Ytterbium doped fiber laser source. The source 11 of infrared laser pulses emits ultrashort light pulses 110 of wavelength λ 1, in the infrared. A first nonlinear optical crystal 1 receives infrared light pulses 110. Under particular conditions, in particular the intensity of the light pulses 110 and the phase tuning, the first nonlinear optical crystal 1 generates light pulses 111 of wavelength λ 2 different from the wavelength λ 1. In particular, when the nonlinear optical crystal operates in frequency doubling, the wavelength λ2 is equal to half the wavelength λ1. For example, if the wavelength λ1 is equal to 1030 nm, the wavelength λ2 is equal to 515 nm. The transfer of the energy from the wavelength λ 1 to the wavelength λ 2 in the nonlinear optical crystal is partial, so that at the output of the first nonlinear optical crystal 1, there is a pulse 111 of wavelength X2 and a pulse 110 of wavelength X1. In the example of FIG. 1, another nonlinear optical crystal 2 is disposed on the optical path at the output of the first nonlinear optical crystal 1. The other nonlinear optical crystal 2 receives light pulses 110 of wavelength X1 and light pulses 111 of wavelength λ2, the light pulses 110 and 111 from the same source 11. In particular phase matching conditions, the other nonlinear optical crystal 2 generates, by sum of frequency , other light pulses 112 of wavelength λ3 different from the wavelengths X2 and X1. Thus, the other light pulses 112 have an optical frequency equal to the sum of the optical frequency of the two incident light pulses 110, 111. Such a device makes it possible to obtain harmonics of triple or quadruple frequency of the frequency of the source pulses, the length X3 wave of the light pulses 112 being respectively equal to one-third or quarter of the wavelength X1 of the light pulses 110 emitted by the source 11 of infrared pulses. It is thus possible, for example, for a wavelength λ1 of 1030 nm, to obtain pulses of wavelength λ3 equal to 343.3 nm in the case of tripling, or 257.5 nm in the case of quadrupling.
    [0003] A single frequency doubling conversion does not make it possible to reach ultraviolet wavelengths when the laser source 11 generates light pulses 110 in the near infrared. The generation of triple or quadruple harmonics is generally necessary to obtain pulses in the ultraviolet. However, the efficiency of frequency conversion by harmonic generation in a nonlinear optical crystal decreases as the multiplication factor in harmonic increases. Thus, the efficiency of the frequency conversion can reach 50% to 70% for the frequency doubling but only 20% to 30% for the frequency tripling and 10% to 25 (3/0 for the frequency quadrupling. the case of a source of conventional long-fiber optical fiber infrared pulses, for example erbium-doped or erbium-ytterbium doped optical fiber, the optical fiber is limited in energy When ultra-short pulses of high energy amplified in a chirped pulse amplification (CPA) type system, these pre-stretched pulses undergo nonlinear distortions which accumulate during amplification in the amplifying fiber. output of the frequency converter are in this case limited in energy by the maximum energy of the source of infrared pulses optical fiber.In the case of a solid crystal laser source, for example a Yb: YAG laser, the crystal laser is limited in power, because of the thermal effects in the crystal. The UV-visible pulses at the output of the frequency converter are in this case limited in power by the maximum power of the solid crystal laser source. In the case of a broad mode fiber optic medium (or LMA for large mode area), of large diameter of heart and of short length (50 cm to a few meters), one is in an intermediate case between the lasers conventional fiber and solid state lasers, wherein the UV-visible pulses at the output of the frequency converter are limited in power and / or energy by the power and / or the maximum energy of the wide-mode fiber laser source. TECHNICAL PROBLEM In general, the power and / or energy of laser pulses 111 or 112, of picosecond or femtosecond duration, obtained by frequency conversion is therefore limited by the power and / or the energy of the laser source 11 used and by the conversion efficiency in the nonlinear optical crystal (s) used. One of the aims of the invention is to increase the energy and / or the power of a source of ultra-short pulses in the UV-visible range, especially when the source is based on an optical fiber technology. Another object of the invention is to reduce the wavelength towards the ultraviolet of a source of ultra-short pulses of high energy and / or high power. Yet another object of the invention is to improve the stability over time of a UV-visible ultra-short pulse laser of high energy and / or high power. On the one hand, there is a need for a system and a method for increasing the power and / or energy of the laser pulses at the output of a high-energy ultra-short pulse UV-visible laser and / or high power using a nonlinear optical frequency conversion device. On the other hand, there is a need for an ultra-short pulse laser of high energy and / or high power, at lower wavelengths in the ultraviolet, and preferably based on laser technology. optical fiber. The present invention aims to overcome the disadvantages of prior art and more particularly relates to a UV-visible laser system ultrashort pulses of high power and / or high energy. According to the invention, the laser system comprises a plurality of laser pulse sources, where the plurality of sources comprises between two and five distinct sources, each laser pulse source being adapted to emit at least one ultra-short laser pulse in the visible or infrared domain; at least one non-linear optical crystal adapted to receive two ultra-short laser pulses, said two ultra-short laser pulses being emitted respectively by two separate sources of laser pulses and synchronization means adapted to temporally synchronize said two ultrasonic laser pulses; short incident on said non-linear optical crystal, so that said two ultra-short laser pulses temporally and spatially overlap in said nonlinear optical crystal with any phase shift, said at least one nonlinear optical crystal being adapted to generate, frequency sum, a frequency-converted ultra-short laser pulse having an optical frequency equal to the sum of the respective optical frequencies of the two ultra-short laser pulses temporally and spatially overlapping in said nonlinear optical crystal. Here is meant by any phase shift that the phase difference between two ultrashort pulses from two different sources and superimposed in the nonlinear optical crystal can take any value. In addition, any phase shift may vary over time from a pair of ultrashort pulses to another pair of ultrashort pulses to be superimposed in the same nonlinear optical crystal. The UV-visible laser system makes it possible to increase the power and / or the energy of the ultra-short pulses converted into frequency, without increasing the frequency conversion losses. The energy and / or power of ultra-short UV-visible pulses increases with the number of sources used. The system of the invention makes it possible to produce a pulse with a predetermined conversion efficiency. When the laser system generates an ultra-short pulse train with a certain repetition rate, the system of the invention makes it possible to ensure the stability of the frequency conversion efficiency of a pulse at the next pulse, and therefore the stability of the power and / or energy of ultra-short UV-visible pulses. The system of the invention does not require an interferometric system to measure and control the optical phase shift between each pair of ultra-short pulses superimposed in a non-linear frequency conversion optical crystal. A simple time synchronization system replaces the interferometric system usually used in a nanosecond laser, to achieve the phase matching condition between the superimposed beams in a nonlinear frequency-matched frequency conversion optical crystal. The phase shift may be fluctuating from an ultrashort pulse to the next ultrashort pulse. In contrast, in the nanosecond regime, it is necessary to control the phase agreement for each pair of pulses of a pulse train that it is desired to convert into a frequency in a nonlinear optical crystal. Indeed, in injected nanosecond regime, a laser emits in general several longitudinal modes, which generates instabilities of a pulse ns to the next pulse ns. Particularly interestingly, in the ps or fs regime, ultrashort pulse trains have a great stability over periods of up to several minutes. According to a particular and advantageous embodiment, the laser system comprises N nonlinear optical crystals, where N is an integer greater than or equal to two, each nonlinear optical crystal being adapted to receive two distinct laser pulses emitted respectively by two sources of light. separate laser pulses or generated by frequency sum conversion from two sources of ultra-short laser pulses, said two laser pulses incident on a nonlinear optical crystal being temporally synchronized, and said N nonlinear optical crystals being disposed of whereby a frequency-converted laser pulse is generated by successive frequency sum in said N nonlinear optical crystals. According to one embodiment, the pulsed laser system comprises two separate laser pulse sources, each laser pulse source being adapted to emit an ultra-short laser pulse, in the visible or infrared range, and a non-linear optical crystal. adapted to simultaneously receive an ultrashort laser pulse from each of the two separate laser pulse sources, the nonlinear optical crystal being adapted to generate, by sum of frequency, an ultra-short laser pulse, having an optical frequency equal to the sum of the optical frequencies of the two sources. According to another embodiment, the number N is equal to three, the pulsed laser system comprising three distinct laser pulse sources, each laser pulse source being adapted to emit an ultra-short laser pulse in the visible range or infrared; and a first nonlinear optical crystal adapted to simultaneously receive two ultra-short laser pulses emitted respectively by two of the three different laser pulse sources, the synchronization means being adapted to temporally synchronize said two incident laser pulses on the first optical crystal non-linear manner so that said two incident laser pulses are superimposed temporally and spatially in the first nonlinear optical crystal with any phase shift, the first nonlinear optical crystal being adapted to generate, by sum of frequency, an ultrasonic laser pulse frequency converted short circuit having an optical frequency equal to the sum of the optical frequencies of said two sources, a second nonlinear optical crystal being adapted to simultaneously receive said frequency-converted ultra-short laser pulse and another ultra-short laser pulse emitted respectively by the other source of laser pulses among the three sources of laser pulses, the synchronization means being adapted to temporally synchronize said ultra-short frequency converted laser pulse and said other ultra-short laser pulse incident on the second nonlinear optical crystal such that said ultrashort laser pulses are superimposed temporally and spatially in the second nonlinear optical crystal with any phase shift, the second nonlinear optical crystal being adapted to generate, by sum of frequency, a pulse ultra-short laser having an optical frequency equal to the sum of the optical frequencies of said three sources. According to a particular and advantageous aspect of the invention, each source of laser pulses is adapted to emit an ultra-short pulse, and the synchronization means are adapted to temporally synchronize two distinct laser pulses incident on a nonlinear optical crystal. said two distinct laser pulses are superimposed temporally in said nonlinear optical crystal with a temporal accuracy less than or equal to 10% rms of the duration of said ultra-short pulses and preferably less than or equal to 5% rms of the duration of said ultra-short pulses. According to a particular and advantageous aspect of the invention, the synchronization means comprise at least one optical delay line disposed between, on the one hand, one of said sources of light pulses and, on the other hand, said optical crystal. nonlinear, the optical delay line being adapted to reduce a time delay between two incident light pulses on said nonlinear optical crystal. According to a particular and advantageous aspect of the invention, the synchronization means comprise synchronization electronic means adapted to temporally synchronize two ultra-short laser pulses in a non-linear optical crystal. In one embodiment, the plurality of light pulse sources comprise a plurality of laser sources, each laser pulse source being adapted to emit at least one laser pulse. In another embodiment, the plurality of light pulse sources comprise a common optical oscillator adapted to generate ultra-short mother light pulses of wavelength λ 1; and a plurality of optical amplifier systems, each optical amplifier system being adapted to receive an ultra-short mother light pulse of wavelength λ1 and to generate an amplified ultra-short light pulse of wavelength λ1.
    [0004] According to a particular and advantageous aspect of the invention, the laser system further comprises a time control device comprising a differential cross-correlator adapted to measure a time delay between two distinct laser pulses incident on a non-linear optical crystal.
    [0005] Advantageously, the nonlinear optical crystal is a polarization multiplexing or angular multiplexing nonlinear optical crystal, said nonlinear optical crystal being selected from a barium borate crystal (13-BaB204), or a triborate crystal of lithium (LiB3O5) or a lithium niobate crystal (LiNbO3) of quasi-phase-locked type or PPLN. In one embodiment, the plurality of separate laser pulse sources comprise a plurality of high energy optical fiber laser sources. In another embodiment, the plurality of separate laser pulse sources comprise a plurality of solid laser sources with high power crystals. According to a particular and advantageous aspect of the second embodiment of the invention, the synchronization means comprise synchronization electronic means adapted to temporally synchronize a plurality of laser pulses emitted respectively by said plurality of laser sources. According to another particular and advantageous aspect of the invention, the nonlinear optical system for the frequency conversion further comprises: another source of light pulses adapted to emit at least one other light pulse at a wavelength; synchronization means adapted to temporally synchronize, on the one hand, the light pulse of wavelength X2 generated by frequency conversion at the output of the nonlinear optical crystal with, on the other hand, said other luminous pulse of length X1 wave emitted by the other source of light pulses, and - another nonlinear optical crystal adapted to receive said light pulse of wavelength X2 and the other light pulse of wavelength Xl, said pulses respective wavelengths of light X2 and X1 being temporally synchronized, and the other nonlinear optical crystal being adapted to generate, by frequency conversion, at least one other light pulse of wavelength X3 different from the wavelengths X2 and X1 of said synchronized light pulses. In a particular embodiment, the plurality of separate laser pulse sources comprise a plurality of high energy optical fiber laser sources.
    [0006] In a particular embodiment, the plurality of separate laser pulse sources comprises a plurality of solid crystal laser sources of high power. The invention also relates to a nonlinear optical method of frequency conversion, the method comprising the following steps: a) transmitting a plurality of light pulses, respectively by a plurality of light pulse sources; b) time synchronization of said plurality of light pulses to generate a plurality of synchronized light pulses, c) receiving the plurality of synchronous light pulses on a nonlinear optical crystal, the nonlinear optical crystal being adapted to generate, by frequency conversion, at least one output pulse of wavelength different from the wavelengths of said light pulses of the light pulse sources.
    [0007] Preferably, the time synchronization step b) comprises a step of adjusting an optical delay on at least one optical delay line arranged between a source of light pulses and the nonlinear optical crystal. According to a first embodiment, the transmission step a) comprises transmitting a plurality of source pulses by an oscillator and amplifying each of said source pulses by a separate optical amplifier. According to a second embodiment, the transmission step a) comprises the emission of a plurality of laser pulses by a plurality of laser sources, each laser source being adapted to emit at least one laser pulse. Advantageously, in the second embodiment, the time synchronization step b) comprises an electronic synchronization step adapted to temporally synchronize a plurality of laser pulses emitted by said plurality of laser sources, respectively. The invention will find a particularly advantageous application in ultrashort laser pulse systems.
    [0008] The invention advantageously makes it possible to combine several light sources at a time to convert them into optical frequency and to summon the optical power. The present invention also relates to the features which will emerge in the course of the description which follows and which will have to be considered individually or in all their technically possible combinations.
    [0009] This description given by way of nonlimiting example will better understand how the invention can be made with reference to the accompanying drawings in which: - Figure 1 shows schematically a non-linear optical conversion system according to the prior art; FIG. 2 schematically illustrates the principle of a non-linear optical frequency conversion system according to the invention; FIG. 3 schematically illustrates a first embodiment of the invention; FIG. 4 schematically illustrates a second embodiment of the invention; - Figure 5 schematically illustrates a third embodiment of the invention; - Figure 6 schematically illustrates a differential cross-correlator device for measuring the optical delay between two laser pulses. DETAILED DESCRIPTION FIG. 2 represents a UV-visible ultrahigh-pulsed laser system of high power and / or high energy conversion by sum of frequency. The configuration of the proposed UV-visible laser system is based on the use of separate laser sources and not of a single source as in the previous system illustrated in FIG. 1. By way of illustrative example, the system of FIG. 2 comprises three distinct laser sources: a laser source 11, a laser source 12 and a laser source 13. Advantageously, the laser sources 11, 12, 13 are mode-locking ultra-short-pulse laser sources. In general, the system of the invention comprises at least two distinct laser sources and up to five distinct ultra-short pulse laser sources. In the system of FIG. 2, a first source 11 and a second source 12 which are spatially separated laser sources are initially considered. The first source 11 emits ultra-short pulses 31 of wavelength λ 1 and the second source 12 emits ultra-short pulses 32 of wavelength λ 2. The first source 11 and the second source 12 are not coherent with each other. The first source 11 and the second source 12 are arranged to couple an ultrashort pulse 31 of the first source 11 and another ultrashort pulse 120 of the second source 12 in a first non-linear frequency conversion crystal 1. For this purpose, an optical system may be arranged between the sources 11, 12 and the nonlinear optical crystal 1, so as to spatially and temporally superimpose an ultra-short pulse 31 and an ultrashort pulse 32 in the first non-linear crystal 1 of frequency conversion.
    [0010] In nanosecond regime, to generate pulses by sum of frequency in a nonlinear optical crystal, it is essential to enslave the optical phase between successive incident pulses, in order to ensure the stability in power and / or energy of the converted pulses. in frequency as a function of time. The enslavement of the optical phase generally requires the implementation of an accurate interferometric system for measuring the optical phase shift between successive pulses of nanosecond duration. On the contrary, according to the invention, in addition to fulfilling phase matching conditions in the non-linear crystal, the necessary and sufficient condition to produce ultrashort pulses (in picosecond regime, up to 20 ps, or in steady state). femtosecond) by sum of frequencies in the non-linear crystal 1, is that an ultra-short pulse 31 and another ultra-short pulse 32 overlap temporally within the non-linear crystal 1, with any temporal phase relationship between these two pulses 31 and 32. Preferably, the two sources 11, 12 emit at the same rate of repetition ultrashort pulses 31 and 32 of the same pulse duration, having an energy of the same level and which overlap spatially in the nonlinear optical crystal 1. Time control is sufficient to ensure the stability of the frequency conversion efficiency for a series of ultra-short pulses within a time interval a from one microsecond to several minutes. The enslavement of the temporal synchronization being realized, without enslavement of the optical phase, one does not observe instability of an ultra-short pulse converted in frequency to the following ultra-short pulses, in the same train of pulses, also converted to frequency. It is therefore necessary to ensure the temporal synchronization between the ultra-short pulses 31 and 32 of the two sources 11 and 12 in the first non-linear optical frequency conversion crystal 1, with better time accuracy than the duration of the pulses. ultra-short. This temporal synchronization can be provided electronically or optically, as detailed in connection with FIGS. 3 to 5. The first source 11, the second source 12 and the first non-linear frequency conversion crystal 1 make it possible, under the condition of synchronization of the pulses. ultrashort 31 and 32, to generate ultra-short pulses 131, having an optical frequency equal to the sum of the respective optical frequencies of ultra-short source pulses 31 and 32 respectively generated by the sources 11 and 12. The system of Figure 2 further comprises a third source 13 and a second non-linear frequency conversion crystal 2. The third source 13 is spatially separated from the first source 11 and the second source 12 respectively. The first source 11, the second source 12 and the third source 13 are not coherent with each other. The third source 13 emits ultra-short pulses 33 at a wavelength λ3. The second nonlinear optical frequency conversion crystal 2 is disposed on the optical path downstream of the first nonlinear optical crystal 1, so as to receive an ultra-short pulse 33 of the third source 13 and an ultra-short pulse 131 For this purpose, an optical system (not shown) is disposed between the third source 13 and the first and second nonlinear optical crystals 1, 2. conditions in which an ultra-short pulse 33 from the third source 13 and an ultra-short pulse 131 generated by sum of frequency in the first nonlinear optical crystal 1, are spatially and temporally superimposed in the second nonlinear optical crystal 2 , we observe the generation of a new ultra-short pulse 132, whose optical frequency is equal to the sum of the optical frequencies of the three sources 11, 12 and 13. It is assumed here that the durations of the two ultra-short pulses 31, 32 respectively 131, 33 to be combined in a non-linear optical crystal 1, respectively 2, are identical, whether in the picosecond regime or in the femtosecond regime. The synchronization between the ultra-short pulses 33 and 131 in the second non-linear optical frequency conversion crystal 2 must be ensured with better time accuracy than the duration of these pulses. This synchronization can be performed in an electronically or optically active manner, as detailed in connection with FIGS. 3 to 5. The ultraviolet ultra-short pulse-ultraviolet laser system thus configured makes it possible to combine the ultra-short laser pulses of several laser sources. 11, 12, 13 synchronized temporally relative to each other, for two-to-two conversion of the ultra-short pulses of the different sources by sum of successive frequencies in nonlinear crystals arranged successively, in order to produce ultrashort pulses in the ultraviolet of high average power and / or high energy per pulse. For example, if the three sources 11, 12, 13 emit ultra-short pulses 31, 32, 33 of the same wavelength, the laser system makes it possible to generate ultra-short pulses at the triple optical frequency, in other words to a wavelength equal to one third of the wavelength of the sources 11, 12, 13. The distribution of the initial infrared power in several sources 11, 12, 13 or more amplification channels allows, with the limitations of a given technology, to push the accessible performance in power and / or energy in the ultraviolet domain. The ultra-short pulse 132 obtained by frequency conversion has an energy, respectively a power, which increases as a function of the sum in energy, respectively in power, of the source pulses 31, 32, 33. The energy, respectively the power the ultra-short pulse 132 is not limited by the energy, respectively the power, of one of the source pulses 31, 32, 33, but by the sum of the energy limits, respectively in power, of the different sources 11, 12, 13. This principle exposed in connection with Figure 2 can be generalized to any harmonic degree from the fundamental radiation, the harmonic degree corresponds to it the maximum number of laser sources that can be combined. Thus, for frequency doubling, there will be two separate laser sources, for tripling, of three laser sources, for quadrupling, from two to four laser sources. The combination of an additional source can be easily achieved by adding an independent source module and synchronization, without necessarily adding a non-linear optical crystal. A laser system combining several sources makes it possible to ensure the energy and / or power stability of the ultra-short pulses converted into frequency delivered by the system. The configuration illustrated in FIG. 2 is particularly suitable for ultrashort pulse sources 11, 12, 13, especially when they are injected by mode-locked laser sources.
    [0011] In order to obtain the best conversion efficiency and / or the best power stability from one pulse to the next pulse, the time synchronization of the pulses in a nonlinear optical frequency conversion crystal is controlled and optimized with regard to the duration of the pulses considered, according to different active synchronization strategies, detailed in connection with FIGS. 3 to 6.
    [0012] Fig. 3 schematically shows a multibeam frequency conversion laser system according to the first embodiment with active optical synchronization. The first embodiment is based on the use of a common laser injection source, called oscillator 10. Oscillator 10 emits ultra-short mother pulses 20.
    [0013] The ultra-short mother pulses 20 are spatially distributed between several amplification modules, also called optical amplifiers 21, 22, 23. The oscillator 10 and the amplifier 21 form a first source 211 of ultra-short pulses 31. L Oscillator 10 and amplifier 22 form a second source 212 of ultra-short pulses 32. The three sources 211, 212, 213 of ultra-short pulses are thus separated spatially.
    [0014] Oscillator 10 and amplifier 23 form a third source 213 of ultra-short pulses 33. The system of FIG. 3 comprises a first nonlinear optical conversion crystal 1 and a second nonlinear optical conversion crystal 2. . Let us first consider two optical amplifiers 21, 22 and the first non-linear optical conversion crystal 1. The optical amplifier 21 receives an ultra-short pulse 20 and generates an ultra-short amplified pulse 31. Similarly, the optical amplifier 22 receives an ultra-short pulse 20 and generates an ultra-short amplified pulse 32. The pulses amplified ultra-short 31, 32 have the same optical frequency, or the same wavelength X1 and in general the same duration, as the mother pulse 20 of the oscillator 10. An optical system, for example with mirrors, no represented in FIG. 2, directs the ultra-short amplified pulses 31, 32 towards a first nonlinear optical conversion crystal 1. The ultra-short amplified pulses 31, respectively 32, in each amplifier 21, respectively 22, however, undergo a time delay which may be different from one optical amplifier 21 to the other optical amplifier 22. This time delay is generally several picoseconds it is constant from one impulse to the next impulse, but it varies slowly over a period of several minutes. This time delay comes in particular from the difference in optical path length between the optical paths associated respectively with the optical amplifiers 21 and 22. This time delay depends on the amplification technology, in particular the amplification time and the material traversed, and temperature variations that impact the propagation distance of the pulse during this amplification. The multibeam frequency conversion laser system of FIG. 3 provides for placing at least one optical delay line 41 or 42 on at least one channel, for example at the output of the optical amplifier 21 and / or respectively at the output of the optical amplifier. the optical amplifier 22. An error signal is detected which it is desired to minimize in order to minimize the time delay, for example by means of a cross-correlator. The optical delay line (s) 41, 42 make it possible to compensate the time delay between an ultra-short amplified pulse 31 coming from the optical amplifier 21 and an ultra-short amplified pulse 32 coming from the optical amplifier 22. Thus, by using the signal generated by the cross-correlator, the ultra-short amplified pulses 31, 32 are temporally synchronized in the non-linear optical conversion crystal 1. At the output of the non-linear optical conversion crystal 1, an ultra-short pulse 131, doubled in frequency, is obtained. Now consider another optical amplifier 23 and another non-linear optical conversion crystal 2. Advantageously, the other optical amplifier 23 also receives an ultra-short mother pulse 20 coming from the oscillator 10. The optical amplifier 23 amplifies an ultra-short mother pulse 20 and generates an ultra-short amplified pulse 33, of same wavelength X1 as the ultra-short amplified pulses 31 and 32. An optical system not shown in FIG. 3 directs the ultra-short amplified pulse 33 and the ultra-short pulse 131 converted into frequency towards the other nonlinear optical crystal 2 conversion. However, the ultra-short amplified pulse 33 generally has a time delay with respect to the frequency converted ultra-short pulse 131 coming from the first nonlinear optical crystal 1. This time delay is generally several picoseconds, but is constant from one impulse to the next impulse, and varies slowly over a period of several minutes. The multibeam conversion device plans to have another optical delay line 43 on the path of the optical amplifier 23, for example at the output of this optical amplifier 23. The optical delay line 43 makes it possible to compensate for the time delay between an impulse amplified ultra-short 33 from the optical amplifier 23 and an ultrashort pulse 131 converted into frequency from the first non-linear optical crystal 1. Thus, the ultra-short amplified pulse 33 and the ultra-short pulse 131 converted into frequency are synchronized temporally in the nonlinear optical conversion crystal 2. At the output of the non-linear optical conversion crystal 2, an ultra-short pulse 132 is obtained which is tripled in frequency with respect to the frequency of the oscillator 10. Several methods can be used to combine the pulses in the non-linear optical crystals. linear 1, 2 conversion. More particularly, polarization multiplexing and angular multiplexing are considered here. Polarization multiplexing consists in arranging two pulses such that each pulse incident in the crystal has a polarization orthogonal to the other, the type of interaction then being of type II in the conversion crystal. Angular multiplexing consists in arranging two incident pulses so that they form a different angle of incidence in the crystal, provided that the two pulses are spatially superimposed in the same conversion crystal. In the case of angular multiplexing, the two pulses can then have the same polarization (type I interaction), or orthogonal polarization (type II interaction). The first nonlinear optical conversion crystal 1 is, for example, a type II barium beta borate (or BBO) crystal, and the second nonlinear optical conversion crystal 2 is for example also a type II BBO crystal. . Advantageously, the nonlinear optical crystal is oriented at normal incidence and the cutting angle of the crystal makes it possible to achieve phase agreement between the three waves propagating in the crystal. Depending on the energy levels of the pulses, the quasi-phase-locked crystals (such as periodically lithium lithium niobate, or PPLN) may be preferred, for low energies (nJ) in collinear configuration, while the lithium triborate (or LBO) may be preferred at higher energy (mJ), type II collinear or type I non-collinear. By way of example, a laser source 11 with a femtosecond Ytterbium doped fiber of the prior art is considered. Such a source 11 typically emits pulses 31 of energy 20 ptJ per pulse, with a pulse duration of 400 fs, at a central wavelength X1 of 1030 nm and at a rate of 1 MHz. Such a source 11 is limited in energy by the optical nonlinearities accumulating during the amplification in the active fiber of the previously pre-stretched pulse. In order to have energy pulses 184 at an ultraviolet wavelength of 343 nm and at 1 MHz, a conventional approach would be to develop a source emitting at least 60 ptJ at 1 MHz, requiring a three-fold stretch most important of the impulse before amplification or fiber design having an effective area three times larger. In both cases, it is also necessary to manage a thermal deposit three times greater in the same active fiber.
    [0015] In contrast, according to the embodiment illustrated in FIG. 3, for example three amplifiers 21, 22, 23 emitting pulses each having an energy of 20 μJ, injected by the same femtosecond oscillator 10 are used. The synchronization of the amplified pulses 31 , 32, 33 is controlled for example by a differential optical cross-correlation device, which makes it possible to actively adjust the time delay between the three pulses which are successively combined by sum of frequency in the non-linear crystals 1, 2. Embodiment provides high energy pulses in the ultraviolet without exceeding the thermal deposition limits in each of the optical fiber amplifiers 21, 22, 23. The second embodiment uses a plurality of distinct laser sources, synchronized with each other. one with the other electronically with a time accuracy less than the pulse duration. FIG. 4 schematically represents a multi-beam frequency conversion optical system according to the second embodiment, with electronic synchronization.
    [0016] Consider first two laser sources 11, 12 and the non-linear optical conversion crystal 1. The laser source 11 emits an ultra-short laser pulse 31. The laser source 12 emits an ultra-short laser pulse 32. The sources laser 11 and 12 are spatially separated. In this case, the laser sources 11 and 12 and are not coherent with each other. A conventional electronic synchronization system 50 is connected on the one hand to the laser source 11 by an electronic link 51 and on the other hand to the laser source 12 via an electronic link 52. The electronic delay, between the emission of the source laser 11 and the laser source 12, is measured by means of a phase detector on electronic signals by a conventional RF technique. The electronic synchronization system 50 thus makes it possible to temporally synchronize the ultra-short laser pulse 31 and the ultra-short laser pulse 32.
    [0017] An optical system (not shown) directs the ultra-short laser pulses 31 and 32 to the nonlinear optical conversion crystal 1. In a complementary manner, as illustrated in FIG. 4, the multibeam conversion system further comprises at least one optical delay line 41 and / or respectively 42, on at least one channel, for example at the output of the laser source 11 and / or respectively, at the output of the laser source 12. The relative time delay between an ultra-short laser pulse 31 and an ultra-short laser pulse 32 is for example measured by cross-correlation. The delay line (s) 41, 42 make it possible to compensate for the relative time delay between an ultra-short laser pulse 31 coming from the laser source 11 and an ultra-short laser pulse 32 coming from the laser source 12. Suppose here that the different sources 11, 12 generate ultrashort pulses of the same duration and at the same rate of repetition. As indicated above, in ultrashort pulse mode, the time delay between the ultra-short pulses 31, 32 from two sources is generally of the order of the ps, but this delay is constant from one pulse to the next. next pulse and slowly varies the duration of an ultrashort pulse over a period of time of several minutes. Thanks to the time synchronization electronic system, and optionally through the delay lines 41, 42, the ultra-short laser pulses 31, 32 are temporally synchronized in the nonlinear optical conversion crystal 1. At the output of the optical crystal no -linear 1, we obtain an ultra-short pulse 131, doubled in frequency. The following pulses 31, 32 are also synchronized. Let us now consider another laser source 13 and another nonlinear optical conversion crystal 2. The other laser source 13 emits another ultra-short laser pulse 33. An optical system (not shown in FIG. 4) directs the pulse ultra-short laser 33 and the ultra-short pulse 131 converted in frequency towards the other non-linear optical crystal 2. However, the ultra-short laser pulse 33 generally has a time delay with respect to the ultra-short pulse. short frequency converted 131 from the nonlinear optical crystal conversion 1.
    [0018] Advantageously, the electronic synchronization system 50 is connected to the laser source 131 via an electronic link 53 which makes it possible to synchronize the ultrashort laser pulse 33 with the ultra-short pulse 131 converted into a frequency in the nonlinear optical conversion crystal. 2. Complementarily, an optical delay line 43 is arranged between the laser source 13 and the nonlinear optical conversion crystal 2 to refine the synchronization of the ultra-short laser pulse 33 and the ultra-short pulse 131 converted into frequency in the nonlinear conversion crystal 2. The nonlinear conversion crystal 2 generates an ultra-short pulse 132, by frequency conversion, from the ultra-short laser pulse 33 and the ultra-short pulse 131 converted to frequency. The ultra-short pulse 132 has an optical frequency equal to the sum of the optical frequencies of the laser pulse 33 and the converted pulse 131. The ultra-short pulse 132 has the same duration, the same spatial profile as the an ultra-short laser pulse 31, 32 or 33, with an energy which depends on the usual conversion efficiency of the nonlinear crystals 1 and / or 2: 50 to 70% for the second harmonic generation (SHG), at 30% for third harmonic generation (THG), 15 to 25% for fourth harmonic generation (FHG). Figure 5 schematically illustrates a third embodiment of the invention. The same reference signs designate the same elements as in FIG. 4.
    [0019] The laser system comprises a device 80 comprising a femtosecond oscillator followed by a stretcher, for temporally stretching the pulses delivered by the oscillator. A first amplifier system 81 comprises a first optical amplifier followed by a first compressor for recompressing the amplified pulses. Similarly, a second amplifier system 82 includes a second optical amplifier followed by a second compressor for recompressing the amplified pulses, and a third amplifier system 83 includes a third optical amplifier followed by a third compressor for recompressing the amplified pulses. Advantageously, each compressor comprises a translation stage, which makes it possible to modify the propagation time of the pulse. Each compressor of each of the amplifier systems 81, 82, 83 thus integrates the function of recompression of the stretched pulses as well as the optical delay line function. These compressors thus make it possible to adjust the synchronization between the different amplified pulses 31, 32, 33. The amplifier system 81 forms with the device 80 a first source 311 of ultra-short pulses 31. Similarly, the amplifier system 82 forms with the device 80 a second source 312 of ultra-short pulses 32. Finally, the amplifier system 83 forms with the device 80 a third source 313 of ultra-short pulses 33. In a variant of this third embodiment, one combines optical synchronization means and electronic synchronization means in the same laser system. This combination makes it possible to take advantage of the synchronization dynamics specific to each technique, and thus to decorrelate the servo loops. The laser system of FIG. 5 further comprises a differential cross-correlator 61 disposed between the output of the first amplifier system 81 and the second amplifier system 82 for measuring the time delay between an ultra-short pulse 31 and an ultra-short pulse 32 The laser system of FIG. 5 further comprises another differential cross-correlator 62 disposed between the output of the first nonlinear optical conversion crystal 1 and the output of the third amplifier system 83 for measuring the time delay between an ultrasonic pulse. short 131 converted to frequency and an ultra-short pulse 33 from the third amplifier system 83.
    [0020] Figure 6 schematically illustrates a differential cross-correlator device for measuring the optical delay between two ultra-short laser pulses. A differential cross-correlator is based on a device of two nonlinear crystals in series, or on a device comprising a nonlinear optical crystal used in double pass, in which pass the two pulses whose time synchronization is sought. In the example illustrated in FIG. 6, two ultra-short pulses 31, 32 to be synchronized have a crossed polarization, pass through a first dichroic mirror 71. The parts of each ultra-short pulse 31, 32 temporally overlap with the other are converted by frequency sum into a frequency-sum nonlinear optical crystal 72, the cumulative energy of this frequency-converted pulse is measured on the detector 75 through the second dichroic mirror 74. By reflection of the fundamental wave on the second dichroic mirror 74, each pulse undergoes a different delay accumulated twice because of the double passage in the birefringent plate 73. The overlapping areas of the two pulses are no longer the same, the converted energy is then measured on the second detector 76 by reflection on the first dichroic mirror 71. The difference 77 between the two signals measured by the detectors 75 and 76 provides an indicative the delay between the two pulses 31 and 32 and an indicator of the direction of the delay. This error signal 77 can therefore be directly sent in a feedback loop to an optical delay line on one of the two compressors of the amplifier systems 81, 82, for example. In an alternative and / or complementary manner, the system of the invention comprises passive synchronization means adapted to stabilize the temporal synchronization between ultrashort pulses originating from different sources in a nonlinear optical frequency converter crystal. These passive synchronization means comprise, for example, a mechanical stabilization device with respect to the vibrations so as to reduce the optical delay fluctuations between incident ultra-short pulses on the same non-linear optical crystal. The passive synchronization means may also comprise thermal stabilization means so as to reduce the optical delay fluctuations between thermally induced ultra-short pulses: for example, the supports of the mirrors in the optical path of the ultra-short pulses are preferably in invar so as to limit the thermal drifts. The invention is not limited to the embodiments described herein. The invention applies in particular to an embodiment with four sources of ultrashort pulses of the same optical frequency and three non-linear optical crystals, to form ultra-short pulses of optical frequency equal to the fourth harmonic of the frequency optics of the four sources. This embodiment makes it possible, from sources emitting in the infrared, to generate ultra-short pulses in the UV of high power and / or high energy, and having a stable conversion efficiency of a pulse at the other.
    [0021] Similarly, the invention applies to an embodiment with five sources of ultrashort pulses of the same optical frequency and four non-linear optical crystals, to form ultra-short pulses of optical frequency equal to the fifth harmonic of the optical frequency of the five sources.
    [0022] A first industrial application of the invention relates to the production of a laser source of ultrashort pulses of high energy in the UV, from optical fiber lasers, each optical fiber being limited in energy. Such a system offers the advantage of delivering ultrashort pulses of high energy in the UV, with high energy stability from one pulse to the next pulse in a pulse train.
    [0023] Another industrial application of the invention relates to the production of a laser source of ultrashort pulses of high power in the UV from solid crystal lasers, each crystal laser being limited in power. Such a system offers the advantage of delivering ultrashort pulses of high power in the UV, with high power stability from one pulse to the next pulse in a pulse train.
    [0024] Adjusting the time synchronization is easier and more robust than adjusting an interferometric system. The system of the invention has the advantage of being modular and relatively inexpensive. It is easy to add or replace one source module with another, to adapt the power or energy of the ultrashort output pulses. This system also offers the advantage of facilitating maintenance by replacing a module independently of the rest of the system.
    权利要求:
    Claims (13)
    [0001]
    REVENDICATIONS1. Ultra-short pulse high-power and / or high-energy ultraviolet laser system, characterized in that it comprises: a plurality of laser pulse sources (11, 12, 13, 211, 212, 213, 311 , 312, 313), wherein the plurality of sources comprises between two and five distinct sources, each source (11, 12, 13, 211, 212, 213, 311, 312, 313) being adapted to emit at least one ultra laser pulse short (31, 32) in the visible or infrared range; and at least one nonlinear optical crystal (1) adapted to receive two ultra-short laser pulses (31, 32), said two ultrashort laser pulses (31, 32) being emitted respectively from two sources (11, 12, 211, 212). , 311, 312) separate laser pulses; synchronization means (41, 42, 50, 51, 52) adapted to temporally synchronize said two ultra-short laser pulses (31, 32) incident on said non-linear optical crystal (1), so that said two pulses ultra-short lasers (31, 32) temporally and spatially overlap in said non-linear optical crystal (1) with any phase shift; said at least one nonlinear optical crystal (1) being adapted to generate, by sum of frequency, a frequency-converted ultra-short laser pulse (131) having an optical frequency equal to the sum of the respective optical frequencies of the two ultra-laser pulses shorts (31, 32) overlapping temporally and spatially in said nonlinear optical crystal (1).
    [0002]
    A UV-visible ultrahigh-pulsed high-power and / or high-energy laser system according to claim 1 comprising N non-linear optical crystals (1, 2), where N is an integer greater than or equal to two, each nonlinear optical crystal (1, 2) being adapted to receive two separate laser pulses respectively emitted by two separate laser pulse sources or generated by frequency sum conversion from two sources of ultra-short laser pulses, said two incident laser pulses on a nonlinear optical crystal being temporally synchronized, and said N nonlinear optical crystals (1, 2) being arranged to generate, by successive sum of frequencies in said N nonlinear optical crystals (1, 2), a frequency converted laser pulse (132).
    [0003]
    3. High-power ultra-short-pulse ultraviolet and high-energy ultraviolet laser system according to claim 2, comprising: two sources (11, 12, 211, 212, 311, 312) of distinct laser pulses, each source laser pulses (11, 12, 211, 212, 311, 312) being adapted to emit an ultra-short laser pulse (31, 32) in the visible or infrared range; and a nonlinear optical crystal (1) adapted to simultaneously receive an ultrashort laser pulse (31, 32) from each of the two separate laser pulse sources (11, 12, 211, 212, 311, 312), the crystal nonlinear optical system (1) being adapted to generate, by sum of frequency, an ultrashort laser pulse (131) having an optical frequency equal to the sum of the optical frequencies of the two sources (11, 211, 12, 212, 311 , 312).
    [0004]
    A high-power, high-energy ultra-short pulse UV-visible laser system according to claim 2 comprising: three sources (11, 12, 13, 211, 212, 213, 311, 312, 313) of separate laser pulses, each laser pulse source (11, 12, 13, 211, 212, 213, 311, 312, 313) being adapted to emit an ultra-short laser pulse (31, 32, 33) in the visible range or infrared; and a first non-linear optical crystal (1) adapted to simultaneously receive two ultra-short laser pulses (31, 32) respectively emitted by two of the three laser pulse sources (11, 12, 211, 212, 311, 312) , the time synchronization means (41, 42, 50, 51, 52) being adapted to temporally synchronize said two incident laser pulses (31, 32) on the first nonlinear optical crystal (1) so that said two pulses lasers (31, 32) overlap temporally and spatially in the first nonlinear optical crystal (1) with any phase shift, the first nonlinear optical crystal (1) being adapted to generate, by sum of frequency, a laser pulse ( 131) ultra-short frequency converted, having an optical frequency equal to the sum of the optical frequencies of said two sources (11, 12, 211, 212, 311, 312), a second nonlinear optical crystal (2) being adapted po ur simultaneously receiving said frequency-converted ultra-short laser pulse (131) and another ultra-short laser pulse (33) respectively emitted from the other laser pulse source (13, 213, 313) among the three sources of laser pulses, the synchronization means (43, 50, 53) being adapted to temporally synchronize said frequency converted laser pulse (131) and said other laser pulse (33) incident on the second nonlinear optical crystal (2) so as to said ultra-short laser pulses (131, 33) overlap temporally and spatially in the second non-linear optical crystal (2) with any phase shift, the second nonlinear optical crystal (2) being adapted to generate, by a sum of frequency, an ultra-short laser pulse (132) having an optical frequency equal to the sum of the optical frequencies of said three sources (11, 12, 13, 211, 212, 213, 311, 312, 313).
    [0005]
    High-power ultra-short pulse ultraviolet and / or high energy ultraviolet laser system according to one of claims 1 to 4, wherein each source (11, 12, 13, 211, 212, 213, 311, 312, 313) is adapted to emit an ultra-short pulse (31, 32, 33), and wherein the synchronization means (41, 42, 43, 50, 51, 52, 53) are adapted to temporally synchronizing two distinct laser pulses (31, 32, 33) incident on a nonlinear optical crystal (1, 2) so that said two distinct laser pulses (31, 32, 33) temporally overlap in said non-optical crystal linear (1, 2) with a temporal accuracy less than or equal to 10% rms of the duration of said ultra-short pulses and preferably less than or equal to 5% rms of the duration of said ultra-short pulses.
    [0006]
    High-power and / or high-energy ultra-short pulse ultraviolet laser system according to one of claims 1 to 5, wherein the synchronization means comprise at least one optical delay line (41, 42). disposed between on the one hand one of said light pulse source (11, 12, 211, 212) and said nonlinear optical crystal (1), the optical delay line (41, 42) being adapted to reduce a delay temporally between two light pulses (31) incident on said nonlinear optical crystal (1).
    [0007]
    7. Ultra-short pulse high-power and / or high-energy ultraviolet-UV laser system according to one of claims 1 to 6, in which the synchronization means comprise electronic synchronization means (50, 51, 52, 53) adapted to temporally synchronize two ultra-short laser pulses (31, 32) in a non-linear optical crystal (1, 2).
    [0008]
    A high power and / or high power ultra-short pulse laser system according to one of claims 1 to 7, wherein said plurality of sources comprises a plurality of laser sources (11, 12, 13), each laser source (11, 12, 13) being adapted to emit at least one ultra-short laser pulse (31, 32, 33).
    [0009]
    A high power and / or high power ultra-short pulse ultraviolet UV laser system according to one of claims 1 to 7, wherein said plurality of laser pulse sources comprises: an optical oscillator (10, 80 ) adapted to generate ultra-short mother pulses of wavelength X1; and a plurality of optical amplifier systems (21, 22, 23, 81, 82, 83), each optical amplifier system (21, 22, 23, 81, 82, 83) being adapted to receive an ultra-short mother pulse (20, 22, 23, 81, 82, 83). ) of wavelength X1 and to generate an ultrahigh light pulse (31, 32, 33) amplified wavelength X1.
    [0010]
    10. High-power ultra-short-pulse ultraviolet and high-energy UV-visible laser system according to one of claims 1 to 9, further comprising a time-controlled device, comprising a differential cross-correlator adapted to measure a time delay between two distinct laser pulses (31, 32, 33) incident on a non-linear optical crystal (1, 2).
    [0011]
    11. Ultra-short pulse high power and / or high energy ultraviolet UV laser system according to one of claims 1 to 10, in which said nonlinear optical crystal (1, 2) is a nonlinear optical crystal with polarization multiplexing or angular multiplexing multiplexing, said nonlinear optical crystal (1, 2) being selected from a barium borate crystal (8-BaB204), or a lithium triborate crystal (LiB3O5) or a lithium niobate crystal Lithium (LiNbO3) of quasi-phase-locked type or PPLN.
    [0012]
    High-power ultra-short-wave ultraviolet and high-energy ultraviolet laser system according to one of claims 1 to 11, wherein the plurality of separate laser pulse sources (11, 12, 13, 211 , 212, 213, 311, 312, 313) comprises a plurality of high energy optical fiber laser sources.
    [0013]
    A high-power, high-energy ultra-short pulse UV-visible laser system according to one of claims 1 to 12, wherein the plurality of separate laser pulse sources (11, 12, 13, 211 , 212, 213, 311, 312, 313) comprises a plurality of solid laser sources with high power crystals.
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    同族专利:
    公开号 | 公开日
    WO2016001604A1|2016-01-07|
    US10020632B2|2018-07-10|
    JP2017520806A|2017-07-27|
    CN107078452A|2017-08-18|
    KR20170026451A|2017-03-08|
    EP3164917A1|2017-05-10|
    US20170141530A1|2017-05-18|
    FR3023423B1|2016-07-08|
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    优先权:
    申请号 | 申请日 | 专利标题
    FR1456388A|FR3023423B1|2014-07-03|2014-07-03|UV-VISIBLE LASER SYSTEM WITH ULTRA-SHORT PULSES OF HIGH POWER AND / OR HIGH ENERGY|FR1456388A| FR3023423B1|2014-07-03|2014-07-03|UV-VISIBLE LASER SYSTEM WITH ULTRA-SHORT PULSES OF HIGH POWER AND / OR HIGH ENERGY|
    EP15742363.3A| EP3164917A1|2014-07-03|2015-07-03|Uv-visible laser system having ultrashort high-power and/or high-energy pulses|
    CN201580047279.1A| CN107078452A|2014-07-03|2015-07-03|UV visible laser systems with ultrashort high power and/or high energy pulse|
    JP2017520015A| JP2017520806A|2014-07-03|2015-07-03|UV visible laser system with ultrashort high power and / or high energy pulses|
    US15/322,737| US10020632B2|2014-07-03|2015-07-03|UV-visible laser system having ultrashort highpower and/or high-energy pulses|
    PCT/FR2015/051847| WO2016001604A1|2014-07-03|2015-07-03|Uv-visible laser system having ultrashort high-power and/or high-energy pulses|
    KR1020177000192A| KR20170026451A|2014-07-03|2015-07-03|Uv-visible laser system having ultrashort high-power and/or high-energy pulses|
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